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CC BY-NC-SA
6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.
- Subject:
- Applied Science
- Career and Technical Education
- Electronic Technology
- Engineering
- Physical Science
- Physics
- Material Type:
- Full Course
- Provider:
- MIT
- Provider Set:
- MIT OpenCourseWare
- Author:
- Livermore, Carol
- Voldman, Joel
- Date Added:
- 02/01/2007