Micro/Nano Processing Technology, Fall 2005
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| Type: | Course Related Materials |
| Grade Level: | Post-secondary |
Author: Schmidt, Martin
Subject: Science and Technology
Institution Name:
M.I.T.
Collection Name: MIT OpenCourseWare
Abstract: Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma etching. Emphasis on the interrelationships between material properties, device structure, and the electrical behavior of devices. Provides background for thesis work in microelectronics or for 6.151.
Details
Course Type: Full Course
Material Types: Activities and Labs, Assessments, Homework and Assignments, Lecture Notes, Syllabi
Media Formats: Text/HTML, Downloadable docs
Language: English
