Design and Fabrication of Microelectromechanical Devices, Spring 2007

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Author:

Livermore, Carol, Voldman, Joel

Subject:

Science and Technology

Institution Name:

M.I.T.

Collection:

MIT OpenCourseWare

Grade Level:

Post-secondary

Abstract:

Introduction to microelectromechanical devices (MEMS). Material properties, microfabrication technologies, structural behavior, piezoresistive and capacitive sensing, electrostatic actuation, fluid damping, noise, amplifiers, and feedback systems. Student teams design microsystems (sensors, electronics, and feedback) to meet a set of specifications (sensitivity, frequency response, linearity) using a realistic microfabrication process. Emphasis on modeling and simulation in the design process.

Languages:

English

Material Type:

Activities and Labs, Full Course, Homework and Assignments, Lecture Notes, Syllabi

Media Format:

Graphics/Photos, Text/HTML, Downloadable docs

Conditions of Use:

Creative Commons Attribution-Noncommercial-Share Alike 3.0