OER Recommender |
Semiconductor Manufacturing, Spring 2003
Author: Boning, Duane
Subject: Science and Technology
Institution Name:
M.I.T.
Collection Name: MIT OpenCourseWare
Abstract: 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; analysis and scheduling of semiconductor manufacturing operations. Details
Course Type: Full Course
Material Types: Activities and Labs, Assessments, Homework and Assignments, Lecture Notes, Syllabi
Media Formats: Text/HTML, Downloadable docs
Language: English
Conditions of Use: Creative Commons Attribution Non-Commercial Share Alike 3.0 Additional InformationGeographic
Regional Relevance: All
Reviews
By: lewlee
- How did you use this material? |
Tags For This ItemTags are a way to find OER by keywords added by users
Keywords
Electrical Engineering and Computer Science
Semiconductor manufacturing
advanced process control
computer integrated manufacturing
control chart design
distributions
empirical equipment
equipment control
equipment diagnosis
equipment monitoring
estimation
experimental design
factory design
factory infrastructure
factory modeling
factory operation
health and safety
hypothesis testing
multistage process control
planning
process modeling
run by run
scheduling
spatial models
spatial variation
statistical process control
statistics
yield learning
yield models
Keywords are descriptions assigned by the provider or the OER Commons Team.
|