Semiconductor Manufacturing, Spring 2003

• Author: Boning, Duane
• Subject: Science and Technology
• Institution Name: M.I.T.
• Collection: MIT OpenCourseWare
• Grade Level: Post-secondary

• Abstract: 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; analysis and scheduling of semiconductor manufacturing operations.

• Course Type: Full Course
• Languages: English
• Material Types: Activities and Labs, Assessments, Homework and Assignments, Lecture Notes, Syllabi
• Media Formats: Text/HTML, Downloadable docs

• Conditions of Use: Creative Commons Attribution-Noncommercial-Share Alike 3.0

  

Reviews

- How did you use this material?
My own personal knowledge

- In which courses or programs did you use the material?
I used this to try and better understand semiconductors.

- What knowledge and skills do you need?
Yes.

- Is the material appropriate?
Yes.

- lewlee