Remix and Share
Semiconductor Manufacturing, Spring 2003
- Author:
- Boning, Duane
- Subject:
- Science and Technology
- Institution Name:
- M.I.T.
- Collection:
- MIT OpenCourseWare
- Grade Level:
- Post-secondary
- Abstract:
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; analysis and scheduling of semiconductor manufacturing operations.
- Languages:
- English
- Material Type:
- Activities and Labs, Assessments, Full Course, Homework and Assignments, Lecture Notes, Syllabi
- Media Format:
- Text/HTML, Downloadable docs
- Conditions of Use:
-
Creative Commons Attribution-Noncommercial-Share Alike 3.0
Comments:
- How did you use this material?
My own personal knowledge
- In which courses or programs did you use the material?
I used this to try and better understand semiconductors.
- What knowledge and skills do you need?
Yes.
- Is the material appropriate?
Yes.