Keywords: statistical process control
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Control of Manufacturing Processes (SMA 6303), Spring 2004
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| Type: | Course Related Materials |
Subject: Science and Technology
Collection: MIT OpenCourseWare
Grade Level:
Post-secondary
Abstract: The objective of this subject is to understand the nature of manufacturing process variation and the methods for its control. First, a general process model for control is developed to understand the limitations a specific process places on the type of control used. A general model for process variation ... More »
Semiconductor Manufacturing, Spring 2003
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| Type: | Course Related Materials |
Subject: Science and Technology
Collection: MIT OpenCourseWare
Grade Level:
Post-secondary
Abstract: 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback ... More »