Keywords: process modeling
Loading...
Displaying 1-2 of 2 results.
Physics of Microfabrication: Front End Processing, Fall 2004
| Rating: | |
| Type: | Course Related Materials |
Subject: Science and Technology
Collection: MIT OpenCourseWare
Grade Level:
Post-secondary
Abstract: Fundamental principles of the processes used in the fabrication of silicon monolithic integrated circuits. Physical models of bulk crystal growth, thermal oxidation, solid-state diffusion, ion implantation, epitaxial deposition, chemical vapor deposition, and physical vapor deposition. Refractory metal ... More »
Semiconductor Manufacturing, Spring 2003
| Rating: | |
| Type: | Course Related Materials |
Subject: Science and Technology
Collection: MIT OpenCourseWare
Grade Level:
Post-secondary
Abstract: 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback ... More »