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Keywords: health and safety

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Semiconductor Manufacturing, Spring 2003

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Type: Course Related Materials
Subject: Science and Technology
Collection: MIT OpenCourseWare
Grade Level: Post-secondary

Abstract: 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback ... More »

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