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Semiconductor Manufacturing, Spring 2003
(Complete Item Description)
- Abstract:
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; analysis and scheduling of semiconductor manufacturing operations.
- Subject:
- Science and Technology
- Grade Level:
- Post-secondary
- Collection:
- MIT OpenCourseWare