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Submicrometer and Nanometer Technology, Spring 2006

(Complete Item Description)

Abstract:: This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored.

Subject:: Science and Technology
Grade Level:: Post-secondary
Collection:: MIT OpenCourseWare

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Top Keywords

And Electron Lithography And Measurement Techniques And Nanotechnology And Plasma Etching Techniques Aqueous Information Storage Interferometric ion Ion Implantation Lift-Off and Electroplating Microelectronics Microphotonics Optical and Electron Microscopy Optical Projection Preparation Resist Technology Submicron and Nanometer Structures Surface Characterization X ray

Conditions of Use

No Strings Attached
Remix and Share
Share Only
Read the Fine Print

No restrictions on your remixing, redistributing, or making derivative works. Give credit to the author, as required.

Your remixing, redistributing, or making derivatives works comes with some restrictions, including how it is shared.

Your redistributing comes with some restrictions. Do not remix or make derivative works.

Copyrighted materials, available under Fair Use and the TEACH Act for US-based educators, or other custom arrangements. Go to the resource provider to see their individual restrictions.

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