Micro/Nano Processing Technology, Fall 2005

Abstract:: Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma etching. Emphasis on the interrelationships between material properties, device structure, and the electrical behavior of devices. Provides background for thesis work in microelectronics or for 6.151.

Microelectronics Processing Technology, Fall 2003

Abstract:: Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sessions on basic processing techniques such as diffusion, oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma etching. Emphasis on the interrelationships between material properties, device structure, and the electrical behavior of devices. Provides background for thesis work in microelectronics or for 6.151. This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.

Abstract:: Optical and optoelectronic properties of semiconductors, ceramics, and polymers. Electronic structure, refractive index, electroluminescence, electro-optic and magneto-optic effects, and laser phenomena. Microphotonic materials and structures; photonic band gap materials. Materials design and processing for lasers, waveguides, modulators, switches, displays and optoelectronic integrated circuits. Alternate years. This course covers the theory, design, fabrication and applications of photonic materials and devices. After a survey of optical materials design for semiconductors, dielectrics and polymers, the course examines ray optics, electromagnetic optics and guided wave optics; physics of light-matter interactions; and device design principles of LEDs, lasers, photodetectors, modulators, fiber and waveguide interconnects, optical filters, and photonic crystals. Device processing topics include crystal growth, substrate engineering, thin film deposition, etching and process integration for dielectric, silicon and compound semiconductor materials. The course also covers microphotonic integrated circuits and applications in telecom/datacom systems. Course assignments include three design projects that emphasize materials, devices and systems applications.

Abstract:: Optical and optoelectronic properties of semiconductors, ceramics, and polymers. Electronic structure, refractive index, electroluminescence, electro-optic and magneto-optic effects, and laser phenomena. Microphotonic materials and structures; photonic band gap materials. Materials design and processing for lasers, waveguides, modulators, switches, displays and optoelectronic integrated circuits. Alternate years. This course covers the theory, design, fabrication and applications of photonic materials and devices. After a survey of optical materials design for semiconductors, dielectrics and polymers, the course examines ray optics, electromagnetic optics and guided wave optics; physics of light-matter interactions; and device design principles of LEDs, lasers, photodetectors, modulators, fiber and waveguide interconnects, optical filters, and photonic crystals. Device processing topics include crystal growth, substrate engineering, thin film deposition, etching and process integration for dielectric, silicon and compound semiconductor materials. The course also covers microphotonic integrated circuits and applications in telecom/datacom systems. Course assignments include four design projects that emphasize materials, devices and systems applications.