Design and Fabrication of Microelectromechanical Devices, Spring 2007
(Complete Item Description)
- Abstract:
Introduction to microelectromechanical devices (MEMS). Material properties, microfabrication technologies, structural behavior, piezoresistive and capacitive sensing, electrostatic actuation, fluid damping, noise, amplifiers, and feedback systems. Student teams design microsystems (sensors, electronics, and feedback) to meet a set of specifications (sensitivity, frequency response, linearity) using a realistic microfabrication process. Emphasis on modeling and simulation in the design process.
- Subject:
- Science and Technology
- Grade Level:
- Post-secondary
- Collection:
- MIT OpenCourseWare
